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News from Axus Technology
December 2015
Axus Technology delivers performance improvements for planarization, substrate thinning, and cleaning applications for existing and new tools.  As a valued member of the semiconductor community we are pleased to be able to share the following information with you.  Please let us know if we can provide any additional information that might be useful.
2015 ICPT Conference - A Great Success!     
More than 350 CMP professionals, educators, management, and engineers from all over the globe came together from September 30 to October 2, at the Wildhorse Pass Hotel and Convention Center in Chandler, Arizona, for the 2015 International Conference on Planarization Technology.

The annual ICPT Conference has become the premier gathering of the industry's planarization leadership from the hands-on user community, research and development institutes and colleges and universities.
 
The conference was also the perfect setting for this technology leading organization to honor Dr. Klaus Beyer, a retired IBM Fellow, with the organization's first-ever "Lifetime Achievement Award" for outstanding contribution to the science and technology of the Chemical Mechanical Planarization process.
 
Presenting companies included: IBM, Intel, Ebara, AMAT, Dow Chemical, Cabot Microelectronics, Fraunhofer Institute, Tsinghua University, Micron Technology, TSMC, Samsung and Hynix with keynotes from Global Foundries and Dr. Klaus Beyer, an IBM Fellow (retired).   Innovation, improvement, and increased productivity underlined nearly all of the presentations.
 
ICPT Honors Dr. Klaus Beyer for CMP Discovery
The ICPT board and members were privileged to present Dr. Klaus Beyer with the first ICPT Lifetime Achievement Award.
The ICPT board and members were privileged to present Dr. Klaus Beyer with the first ICPT Lifetime Achievement Award.
The recent ICPT Technical Conference which was held at the Wildhorse Pass Resort in Chandler, Arizona, was the perfect setting for this technology-leading organization to honor Dr. Klaus Beyer, a retired IBM Fellow, with the "Lifetime Achievement Award" for outstanding contribution to the science and technology of the Chemical Mechanical Planarization process. Dr. Beyer is renowned to have made the first discovery of planarization.

For the complete story on how Dr. Beyer created the first planarization process, click here.
CMP Support Items for Mirra and Reflexion CMP Tools  
The Reflexion LK conditioning arm is completely rebuilt and tested prior to shipment. Axus can also recoat the conditioning arms with an improved coating that is more durable and easier to keep clean.
 
CMP tools require routine maintenance and support for a number of key components.  Axus Technology provides remanufacturing services for many of these essential component parts, providing both routine care and complete remanufacturing, as required.  In many cases, we maintain a repair cycle for assemblies including conditioning arms and wafer carriers, providing rebuilt items for stocking in anticipation of PMs, as well as routine repair and return.  Among the items rebuilt in our facility are:
-           Mirra Conditioning Arms,
-           Reflexion and Reflexion LK Conditioning Arms
-           Mirra Platen Restoration
-           Mirra HCLU assemblies
-           Carriers
-          NSK Motor and Drive assemblies.

Upgrades for Strasbaugh 7AA Grinders  
The In Process Gauging upgrade for the Strasbaugh 7AA provides real-time thickness measurement and process control that can be used for a wide range of substrate sizes_ including small substrates
Axus Technology delivers and supports a wide array of backgrinding tools from several OEMs.  One of these tools, the Strasbaugh 7AA grinder, has proven to be a durable industry workhorse and continues to be a versatile and exceptionally economical tool.  Aside from being one of the first backgrinding platforms delivered to the semiconductor industry, the coaxial grinding wheel design, with both the coarse and fine wheels operating on the same spindle, make it remarkably easy to align and maintain. 
 
Axus Technology delivers completely rebuilt tools in a variety of configurations.  Tools can be configured for manual or automatic loading, expanded recipe and data storage, and Bernoulli-chuck wafer handling along with other performance enhancements.  The 7AA, initially designed for 3" to 150mm substrates, can also be configured by Axus Technology for use with 200mm and larger substrates.  It's proven to be a very durable and flexible process tool.

Please feel free to contact us for additional information on these or any other CMP process related questions or requirements you may have.

Sincerely,
Barrie Van Devender
Axus Technology
(480)-705-8000

CONTACT US
(480) 705-8000


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Sept 2015 Newseltter

July 2015 Newsletter

October 2014 Newsletter

June 2014 Newsletter

About Axus
Axus Technology provides:
Equipment Sales and Service
  • CMP & Post CMP Cleaning Tools
  • Wafer Thinning Tools 
  • Spare Parts
  • Installation & Service 
  • Tool Upgrades 
  • Process Engineering 
Process Foundry Services
  • CMP & Polish
  • Cleaning
  • Wafer bonding
  • Substrate thinning
  • Edge-grinding
  • ITAR certified


 

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Axus Technology will be Exhibiting at  IMAPS Device Packaging Conference 2016
March 15 - 16, 2016
WekoPa Resort and Casino
Fountain Hills, AZ