Due to the lack of friction, air bearing can position a linear slide to within nanometers or within tenths of arc-seconds in rotational stage applications.
The lack of friction and mechanical contact also means there is no wear, negligible vibration, hysteresis or reversal error.
Motion is highly repeatable and ideal for many inspection and manufacturing operations. Stiction (static friction) is also virtually eliminated, improving resolution capabilities and reducing in-position, hunting (limit cycling) and position repeatability can be obtained within a few fundamental encoder counts.
Similar precision can be obtained by piezo flexure guided stages, however over much smaller travel ranges. Magnetic levitation is another option.
Paired with our ACS controllers creates a highly precision system.
For more information please contact us!
