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2022 Best ALD Paper Award Winner | | |
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Congratulations to the winner of the 2022 Best ALD Paper Award, selected from papers authored by participants in the 22nd International Conference on Atomic Layer Deposition (ALD 2022) and published in JVST A! | |
On the limitations of thermal atomic layer deposition of InN using ammonia
by Karl Rönnby, Henrik Pedersen, and Lars Ojamäe
JVST A 41, 020401 (2023)
This paper is available online for FREE for the next two years!
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ALD 2023
This collection includes papers presented at ALD 2022 held in Ghent, Belgium from June 26-29, 2022, as well as other ALD research articles.
| Image Credit: Zecheng Wu, Yu Zhang, Shiqiang Lu, Rongxu Bai, Na Gao, Kai Huang, Hao Zhu, Shen Hu, Qingqing Sun, David Wei Zhang, Xingwei Ding, Jack C. Lee, and Li Ji, JVST A 40 (4), 10.1116/6.0001787 (2022). | |
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ALD 2022
This collection includes papers presented at ALD 2021 held virtually from June 27-30, 2021, as well as other ALD research articles.
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Read the 2021 Best ALD Paper Award Winner
Image Credit: Antony Premkumar Peter et al., JVST A 39 (4), 10.1116/6.0000821, (2021).
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ALD 2021
This collection includes papers presented at ALD 2020 held virtually from June 29 – July 1, 2020, as well as other ALD research articles.
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Read the 2020 Best ALD Paper Award Winner
Image Credit: Sara Kuraitis, Donghyeon Kang, Anil U. Mane, Hua Zhou, Jake Soares, Jeffrey W. Elam, and Elton Graugnard, JVST A 39 (3), 10.1116/6.0000847, (2021).
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ALD 2020
This collection includes papers presented at ALD 2019 held in Bellevue, Washington from July 21-24, 2019, as well as other ALD research articles.
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Read the 2019 Best ALD Paper Award Winner
Image Credit: Margaret Wolf, Veronica Hayes, Cynthia R. Gerber, Philip G. Quardokus, Jose J. Ortiz-Garcia, Casey Plummer and Rebecca C. Quardokus, JVST A 38 (2), 10.1116/1.5139672, (2020).
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