Most Cited and Downloaded Articles
Published in 2019
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Status and prospects of plasma-assisted atomic layer deposition
Harm C. M. Knoops, Tahsin Faraz, Karsten Arts, and Wilhelmus M. M. (Erwin) Kessels
JVST A 37, 030902 (2019)
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Review Article: Layer-structured carbonaceous materials for advanced Li-ion and Na-ion batteries: Beyond graphene
Wei Ni and Lingying Shi
JVST A 37, 040803 (2019)
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Functional model for analysis of ALD nucleation and quantification of area-selective deposition
Gregory N. Parsons
JVST A
37, 020911 (2019)
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Surface chemical reactions during atomic layer deposition of ZnO, ZnS, and Zn(O,S)
Tran Thi Ngoc Van, Abu Saad Ansari, and Bonggeun Shong
JVST A
37, 020909 (2019)
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Review Article: Crystal alignment for high performance organic electronics devices
Zhengran He, Jihua Chen, and Dawen Li
JVST A
37, 040801 (2019)
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Crystalline tungsten sulfide thin films by atomic layer deposition and mild annealing
Miika Mattinen, Timo Hatanpää, Peter J. King, Kristoffer Meinander, Kenichiro Mizohata, Pasi Jalkanen, Jyrki Räisänen, Mikko Ritala, and Markku Leskelä
JVST A
37, 020921 (2019)
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Atomic layer germanium etching for 3D Fin-FET using chlorine neutral beam
Daisuke Ohori, Takuya Fujii, Shuichi Noda, Wataru Mizubayashi, Kazuhiko Endo, En-Tzu Lee, Yiming Li, Yao-Jen Lee, Takuya Ozaki, and Seiji Samukawa
JVST A
37, 021003 (2019)
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Strategy for simultaneously increasing both hardness and toughness in ZrB
2
-rich Zr
1−x
Ta
x
B
y
thin films
Babak Bakhit, David L. J. Engberg, Jun Lu, Johanna Rosen, Hans Högberg, Lars Hultman, Ivan Petrov, J. E. Greene, and Grzegorz Greczynski
JVST A
37, 031506 (2019)
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Hydrocarbon catalyzed-selective catalytic reduction catalysts using core-shell atomic layer deposited CeO
2
and ZrO
2
David H. K. Jackson, Michael M. Schwartz, Chilan Ngo, Dustin Facteau, Svitlana Pylypenko, Christopher L. Marshall, and Arrelaine A. Dameron
JVST A
37, 020919 (2019)
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Improved performance and stability of In-Sn-Zn-O thin film transistor by introducing a meso-crystalline ZrO
2
high-k gate insulator
Wan-Ho Choi, Jiazhen Sheng, Hyun-Jun Jeong, Jin-Seong Park, MinJung Kim, and Woojin Jeon
JVST A
37, 020924 (2019)
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