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Development of seed layer for electro-deposition of copper on carbon nanotube bundles, Matthew B. Jordan, Ying Feng and Susan L. Burkett, J. Vac. Sci. Technol. B 33, 021202 (2015), Fig. 6.
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Amorphous Si/SiO
2
distributed Bragg reflectors with transfer printed single-crystalline Si nanomembranes
Minkyu Cho, Jung-Hun Seo, Deyin Zhao, Jaeseong Lee, Kanglin Xiong, Xin Yin, Yonghao Liu, Shih-Chia Liu, Munho Kim, Tong J. Kim, Xudong Wang, Weidong Zhou and Zhenqiang Ma
J. Vac. Sci. Technol. B 34, 040601 (2016) |
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Well-aligned NiSi/Si heterostructured nanowire arrays as field emitters
Shasha Lv, Zhengcao Li, Jiecui Liao, Zhengjun Zhang and Wei Miao
J. Vac. Sci. Technol. B 33, 02B101 (2015) |
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Resolution and alignment accuracy of low-temperature in situ electron beam lithography for nanophotonic device fabrication
Manuel Gschrey, Ronny Schmidt, Jan-Hindrik Schulze, André Strittmatter, Sven Rodt and Stephan Reitzenstein
J. Vac. Sci. Technol. B 33, 021603 (2015)
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Bosch etching for the creation of a 3D nanoelectroporation system for high throughput gene delivery
Paul Bertani, Wu Lu, Lingqian Chang, Daniel Gallego-Perez, Ly James Lee, Chiling Chiang and Natarajan Muthusamy
J. Vac. Sci. Technol. B 33, 06F903 (2015)
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Focused-ion beam patterning of organolead trihalide perovskite for subwavelength grating nanophotonic applications
Mohd Sharizal Alias, Ibrahim Dursun, Dong Shi, Makhsud Ismatboevich Saidaminov, Elhadj Marwane Diallo, Davide Priante, Tien Khee Ng, Osman Mohammed Bakr and Boon Siew Ooi
J. Vac. Sci. Technol. B 33, 051207 (2015)
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Direct fabrication of high aspect-ratio metal oxide nanopatterns via sequential infiltration synthesis in lithographically defined SU-8 templates
Chang-Yong Nam, Aaron Stein and Kim Kisslinger
J. Vac. Sci. Technol. B 33, 06F201 (2015)
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Development of seed layer for electrodeposition of copper on carbon nanotube bundles
Matthew B. Jordan, Ying Feng and Susan L. Burkett
J. Vac. Sci. Technol. B 33, 021202 (2015)
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Sub-20 nm
silicon patterning and metal lift-off using thermal scanning probe lithography
Heiko Wolf, Colin Rawlings, Philipp Mensch, James L. Hedrick, Daniel J. Coady, Urs Duerig and Armin W. Knoll
J. Vac. Sci. Technol. B 33, 02B102 (2015)
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In situ monitoring of hydrogen desorption from silicon nanoparticles dispersed in a nonthermal plasma
Thomas Lopez and Lorenzo Mangolini
J. Vac. Sci. Technol. B 34, 041206 (2016)
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Faraday cage angled-etching of nanostructures in bulk dielectrics
Pawel Latawiec, Michael J. Burek, Young-Ik Sohn and Marko Lončar
J. Vac. Sci. Technol. B 34, 041801 (2016)
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