Plasma-Assisted Atomic Layer Deposition:
Basics, Equipment, Applications
February 15, 2023, 1:00-5:00 p.m. ET
Atomic Layer Deposition (ALD) has become a key technology in both the lab and the fab with many devices and other applications benefiting from the (ultra)thin films that can be prepared with very precise thickness control and with unparalleled conformality and uniformity. Nowadays, a significant number of the ALD processes employed are so-called plasma-assisted or plasma-enhanced ALD processes.

In the last decade, this method has faced a breakthrough in high-volume manufacturing and an extensive set of processes and reactor designs have been demonstrated. Yet the reasons why and when to use plasma-assisted ALD are often not clear as well what kind of plasma configurations to use and which conditions to apply. Also, misconceptions about the implications of using plasmas during ALD exist, for example with respect to plasma damage and limitations of conformality. This webinar will address these aspects starting with the basics of ALD and plasma-based processing and will range up to the applications that can benefit from plasma-assisted ALD. Read more.
Erwin Kessels
Professor Department of Applied Physics, Eindhoven University of Technology, The Netherlands
Webinar Cost
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Additional Training & Upcoming Events
Registration Coming Soon
AVS National Online Short Courses
Date: March 13-24, 2023
Time: 10:00 a.m.-5:00 p.m. ET
Platform: Zoom

AVS National will be hosting eight (8) online courses this Spring. More details will be available on the AVS Short Course Schedule.
ICMCTF 2023 is accepting "late news" abstracts through February 22, 2023.
ICMCTF 2023 Short Courses
Date: May 21-25, 2023
Location: Town & Country Resort Hotel and Convention Center, San Diego, CA.
Time: 8:30 a.m.-12:30 p.m. ET or
1:30 p.m.-5:30 p.m. ET

The International Conference on Metallurgical Coatings and Thin Films (ICMCTF) will host eight (8) half-day short courses covering topics related to thin film deposition, characterization, and advanced surface engineering.
Have an Idea for an AVS e-Talk?
Contact Matthew Jordan
AVS e-Talk Chair
Call for Abstracts
Abstract submission for the AVS 23rd International Conference on Atomic Layer Deposition (ALD 2023) featuring the 10th International Atomic Layer Etching Workshop (ALE 2023) is open through February 15, 2023.