ULTRA-THIN LARGE APERTURE 
DIRECT DRIVE ROTARY TABLE ACR-335UT

        
APERTURE (open center)  335 mm

HEIGHT (axial thickness)  22 mm

                       

Direct drive (DDR) technology
Resolution 0.2 arc-sec
Repeatability 0.25 arc-sec
Max speed 300 rpm

 LOW PROFILE
LARGE APERTURE
The ACR-335UT precision rotation stage is the lowest profile rotary table with high-speed direct-drive rotary servo motor on the market.
 
Large 335UT mm center aperture and lightweight construction makes this rotary stage an ideal choice for handling 300-mm silicon wafers for semiconductor processing.
HIGH PRECISION 
HIGH DYNAMICS
ACR-335UT has very wide dynamic speed range and can move at sub-rpm speed with low velocity ripple and accelerate quickly to 300 rpm.  
 
This stage can be easily installed into IntelLiDrives low profile open frame XY tables with a minimal stack-up height to minimize Abbe error.
MULTI-AXIS CONFIGURATION

These features make the ACR-335UTUT outperform the stability, acceleration and settling speed of traditional servo motor gear-driven mechanisms. 

IntelLiDrives offers a wide range of servo amplifiers and advanced controllers to provide a complete, integrated package.  
Direct Drive Rotary Servo Table ACR-260UT
Direct Drive Rotary Servo Table ACR-260UT
MATCHING INDEXERS and DRIVES
Drives and Indexers

Torque control

Velocity control 

Position control 

PLC indexer or CANopen

EtherCAT

Single or dual axes


Features:
Advanced sine wave commutation 
Accurate torque control
Stand-alone or CAN distributed drive
Step/direction interface
Electronic gearing to master encoder
± 10V velocity/current command
Auto-phasing and auto-tuning 
24-160VDC or 115/230VAC operation


Configuration & easy-to-use  tuning and control software
INTELLIDRIVES ACTUATORS and STAGES
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