Systematic compositional analysis of sputter-deposited boron-containing thin films
Babak Bakhit, Daniel Primetzhofer, Eduardo Pitthan, Mauricio A. Sortica, Eleni Ntemou, Johanna Rosen, Lars Hultman, Ivan Petrov and Grzegorz Greczynski
JVST A 39, 063408 (2021)