|
The Journal of Vacuum Science and Technology A is soliciting research articles for a Special Topic Collection on Area Selective Deposition (ASD). This Collection will feature recent discoveries in fundamentals of ASD as well as advances in its technological applications.
Topics
Topics covered include, but are not limited to:
- mechanisms of thin film nucleation and growth
- controllable activation and/or suppression of nucleation
- small molecule inhibition
- bottom-up ASD patterning
- defect formation and mitigation
- combinations of deposition with selective etching
- surface characterization with emphasis on defects
- metrology for area-selective deposition
- all applications of ASD
| 
