|
The Minilock Duo allows two independent process modules to be coupled to a vacuum loadlock. The vacuum loadlock is a separate chamber to load the samples. It has a slit valve to each module that allows the reactor chambers to stay under vacuum, which increases a researcher’s capabilities by not exposing samples to atmosphere between layers. There is a robotic arm that has a direct drive pick-and-place mechanism that provides high reliability, and accurate loading.
Any combination of the following process modules is possible: PR Strip, RIE, PE, ICP, DRIE, PECVD, HDCVD, PVD, ALD.
Trion Technology Benefits:
- Complete process support before and after purchase
- Worldwide sales and service offices
- Dedicated on-site Trion machine shop for rapid customization and fast turnaround
- Trion Technology is a privately held, USA-based company with more than 30 years of industry experience.
| 
