Call for Research Articles

The Journal of Vacuum Science and Technology A is soliciting research articles for publication in Special Topic Collections on Atomic Layer Deposition and Atomic Layer Etching.

Each year, in concert with the annual Atomic Layer Deposition (ALD) meeting and Atomic Layer Etching (ALE) Workshop, the Journal of Vacuum Science and Technology A publishes collections of articles covering the most recent developments and experimental studies in ALD and ALE. These ALD and ALE Special Topic Collections will include papers presented at ALD 2026 and ALE 2026 (June 28 – July 1, 2026 in Tampa, FL), as well as other ALD and ALE research articles that were not presented at the conference but are submitted to the collections. The collections feature articles dedicated to the science and technology of atomic layer controlled deposition and etching. 

Submission Guidelines

Authors are encouraged to use the JVST article template. During submission, you will have an opportunity to tell us that your paper is a part of one of the Collections by choosing either the Special Topic or Conference Collection on “Atomic Layer Deposition (ALD)” or “Atomic Layer Etching (ALE).” See recent collections: ALD 2026, ALE 2026, ALD 2025, ALE 2025, ALD2024, and ALE2024.

As data availability becomes more important and challenges to reproducibility and replication of data continue, consider submitting your data to Surface Science Spectra (SSS) simultaneously with your research article submission. SSS welcomes data submissions related to ALD and ALE for publication in a Special Topic Collection on the topics.

Upon acceptance in SSS, your data will be stored and available as a reference to researchers worldwide, and you will have the accomplishment of another peer-reviewed publication. 

Submission requirements and templates for SSS can be found here.

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